Total depth after etching is 13.637 um
Calculated remaining resist as 7.94um, indicating an erosion of 0.80um in 10 minutes of etching
This equates to an erosion rate of 80 nm/min
The etch depth of 5.70um in 10 mins indicates an etch rate of 570.0nm/min
The selectivity is therefore 7.09:1